High speed deposition system for homogenous sputtering of oxide thin films. The system uses several plasmanozzles mounted
Plazma system was invented for cavity internal surface coating. It is possible to coat cavitties from ∅ 7 mm. The method is applicable for
Department of structure analysis also provides high throughput crystallographic services for universities, research institutes and companies.
This is a fully UHV compatible flexure joint-based optical manipulator. It allows precision, two-axis manipulator of optics in vacuum.
The high power beam dump solution is designed for absorption of high performance pulsed laser beams. We developed three different cooling
The LIDT station is used for determining the laser induced damage threshold (LIDT) of optical components down to the femtosecond regime.